1/20/2012	8:18:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2012	8:18:36 PM	Recipe started at 8:18 PM
1/20/2012	8:18:36 PM	Helium valve closed
1/20/2012	8:18:36 PM	H2 valve closed
1/20/2012	8:18:36 PM	BCl3 valve closed
1/20/2012	8:18:36 PM	PH3 valve closed
1/20/2012	8:18:36 PM	SiCl4 pre valve closed
1/20/2012	8:18:36 PM	SiCl4 post valve closed
1/20/2012	8:18:36 PM	Main Vac valve closed
1/20/2012	8:18:36 PM	Bypass valve closed
1/20/2012	8:18:36 PM	Bubbler valve closed
1/20/2012	8:18:36 PM	Helium MFC set to  0.000000
1/20/2012	8:18:36 PM	H2 MFC set to  0.000000
1/20/2012	8:18:36 PM	BCl3 MFC set to  0.000000
1/20/2012	8:18:36 PM	PH3 MFC set to  0.000000
1/20/2012	8:18:36 PM	SiCl4 MFC set to  0.000000
1/20/2012	8:18:36 PM	Bypass solenoid MFC set to  0.000000
1/20/2012	8:18:36 PM	Tube furnace set to 0
1/20/2012	8:18:39 PM	H2 valve closed
1/20/2012	8:18:39 PM	BCl3 valve closed
1/20/2012	8:18:39 PM	PH3 valve closed
1/20/2012	8:18:39 PM	SiCl4 pre valve closed
1/20/2012	8:18:39 PM	SiCl4 post valve closed
1/20/2012	8:18:39 PM	Main Vac valve closed
1/20/2012	8:18:39 PM	Bypass valve closed
1/20/2012	8:18:39 PM	Bubbler valve closed
1/20/2012	8:18:39 PM	Helium valve opened
1/20/2012	8:18:39 PM	Helium MFC set to  500.000000
1/20/2012	8:18:39 PM	H2 MFC set to  0.000000
1/20/2012	8:18:39 PM	BCl3 MFC set to  0.000000
1/20/2012	8:18:39 PM	PH3 MFC set to  0.000000
1/20/2012	8:18:39 PM	SiCl4 MFC set to  0.000000
1/20/2012	8:18:39 PM	Bypass solenoid MFC set to  0.000000
1/20/2012	8:18:40 PM	Tube furnace set to 0
1/20/2012	8:19:45 PM	Helium valve closed
1/20/2012	8:19:45 PM	H2 valve closed
1/20/2012	8:19:45 PM	BCl3 valve closed
1/20/2012	8:19:45 PM	PH3 valve closed
1/20/2012	8:19:45 PM	SiCl4 pre valve closed
1/20/2012	8:19:45 PM	SiCl4 post valve closed
1/20/2012	8:19:45 PM	Main Vac valve closed
1/20/2012	8:19:45 PM	Bypass valve closed
1/20/2012	8:19:45 PM	Bubbler valve closed
1/20/2012	8:19:45 PM	Helium MFC set to  0.000000
1/20/2012	8:19:45 PM	H2 MFC set to  0.000000
1/20/2012	8:19:45 PM	BCl3 MFC set to  0.000000
1/20/2012	8:19:45 PM	PH3 MFC set to  0.000000
1/20/2012	8:19:45 PM	SiCl4 MFC set to  0.000000
1/20/2012	8:19:45 PM	Bypass solenoid MFC set to  0.000000
1/20/2012	8:19:45 PM	Tube furnace set to 0
1/20/2012	8:19:46 PM	Run finished at 8:19 PM
1/20/2012	8:19:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/20/2012	8:34:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2012	8:34:48 PM	Recipe started at 8:34 PM
1/20/2012	8:34:48 PM	Helium valve closed
1/20/2012	8:34:48 PM	H2 valve closed
1/20/2012	8:34:48 PM	BCl3 valve closed
1/20/2012	8:34:48 PM	PH3 valve closed
1/20/2012	8:34:48 PM	SiCl4 pre valve closed
1/20/2012	8:34:48 PM	SiCl4 post valve closed
1/20/2012	8:34:48 PM	Main Vac valve closed
1/20/2012	8:34:48 PM	Bubbler valve closed
1/20/2012	8:34:48 PM	Bypass valve opened
1/20/2012	8:34:48 PM	Helium MFC set to  0.000000
1/20/2012	8:34:48 PM	H2 MFC set to  0.000000
1/20/2012	8:34:48 PM	BCl3 MFC set to  0.000000
1/20/2012	8:34:48 PM	PH3 MFC set to  0.000000
1/20/2012	8:34:48 PM	SiCl4 MFC set to  0.000000
1/20/2012	8:34:48 PM	Bypass solenoid MFC set to  0.000000
1/20/2012	8:34:48 PM	Tube furnace set to 0
1/20/2012	8:35:51 PM	Helium valve closed
1/20/2012	8:35:51 PM	H2 valve closed
1/20/2012	8:35:51 PM	BCl3 valve closed
1/20/2012	8:35:51 PM	PH3 valve closed
1/20/2012	8:35:51 PM	SiCl4 pre valve closed
1/20/2012	8:35:51 PM	SiCl4 post valve closed
1/20/2012	8:35:51 PM	Main Vac valve closed
1/20/2012	8:35:51 PM	Bubbler valve closed
1/20/2012	8:35:51 PM	Bypass valve opened
1/20/2012	8:35:51 PM	Helium MFC set to  0.000000
1/20/2012	8:35:51 PM	H2 MFC set to  0.000000
1/20/2012	8:35:51 PM	BCl3 MFC set to  0.000000
1/20/2012	8:35:51 PM	PH3 MFC set to  0.000000
1/20/2012	8:35:51 PM	SiCl4 MFC set to  0.000000
1/20/2012	8:35:51 PM	Bypass solenoid MFC set to  0.000000
1/20/2012	8:35:51 PM	Tube furnace set to 0
1/20/2012	8:36:51 PM	Helium valve closed
1/20/2012	8:36:51 PM	H2 valve closed
1/20/2012	8:36:51 PM	BCl3 valve closed
1/20/2012	8:36:51 PM	PH3 valve closed
1/20/2012	8:36:51 PM	SiCl4 pre valve closed
1/20/2012	8:36:51 PM	SiCl4 post valve closed
1/20/2012	8:36:51 PM	Bypass valve closed
1/20/2012	8:36:51 PM	Bubbler valve closed
1/20/2012	8:36:51 PM	Main Vac valve opened
1/20/2012	8:36:51 PM	Helium MFC set to  0.000000
1/20/2012	8:36:51 PM	H2 MFC set to  0.000000
1/20/2012	8:36:51 PM	BCl3 MFC set to  0.000000
1/20/2012	8:36:51 PM	PH3 MFC set to  0.000000
1/20/2012	8:36:51 PM	SiCl4 MFC set to  0.000000
1/20/2012	8:36:51 PM	Bypass solenoid MFC set to  0.000000
1/20/2012	8:36:51 PM	Tube furnace set to 0
1/20/2012	8:36:52 PM	Run finished at 8:36 PM
1/20/2012	8:36:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/20/2012	8:45:24 PM	Tube furnace set to 100
